装备名称 Equipment name

管式低压磷扩装备  Horizontal Low Pressure Phosphorus Diffusion Equipment

装备型号 Equipment Model

DOA-400/DOA-400L

装备用途 Equipment Application

低压磷扩散掺杂
。
Low pressure phosphorus diffusion & doping.

手艺特点  Features 

1、高方阻手艺解决计划
。

Technical solutions for high sheet resistance.

2、奇异双嵌套炉门结构，有用解决炉口偏磷酸问题
。
Unique double-layer-nested furnace door structure,free from metaphosphoric acid problem at the urnace mouth effectively.

3、奇异温区设置，有用解决炉口炉尾方阻匀称性
。
Unique temperature zone setting which guarantees the uniformity of sheet resistance at the furnace mouth and end effectively.

4、高速平稳整体模组推舟机构
。
High-speed and stable integral module boat pushing mechanism.

5、智能化全自动控制
。
Intelligent automatic control.

6、自主知识产权MES软件
。
MES software with independent intellectual property rights.

7、匹配S.C智能化生产治理系统
。

Matching S.C smart production management system.

装备参数  Parameters