装备名称 Equipment name

管式低压磷扩装备  Horizontal Low Pressure Phosphorus Diffusion Equipment

装备型号 Equipment Model

DOA-400/DOA-400L

装备用途 Equipment Application

低压磷扩散掺杂。
Low pressure phosphorus diffusion & doping.

手艺特点  Features 

1、高方阻手艺解决计划。

Technical solutions for high sheet resistance.

2、奇异双嵌套炉门结构
，有用解决炉口偏磷酸问题。
Unique double-layer-nested furnace door structure,free from metaphosphoric acid problem at the urnace mouth effectively.

3、奇异温区设置
，有用解决炉口炉尾方阻匀称性。
Unique temperature zone setting which guarantees the uniformity of sheet resistance at the furnace mouth and end effectively.

4、高速平稳整体模组推舟机构。
High-speed and stable integral module boat pushing mechanism.

5、智能化全自动控制。
Intelligent automatic control.

6、自主知识产权MES软件。
MES software with independent intellectual property rights.

7、匹配S.C智能化生产治理系统。

Matching S.C smart production management system.

装备参数  Parameters