装备名称 Equipment Name

管式PECVD装备  Horizontal PECVD

装备型号 Equipment Model

PD-520/PD-520L/PD-520MAX

装备用途 Equipment Application

SiN、SiON等薄膜沉积。
Depositionof SiN, SiON ,etc.

手艺特点  Features

1、可靠电极接触，有用镌汰粉尘、降低高频报警频次。

Reliable electrode contact, effectively reduce dust as well as the frequency of high frequency alarms.

2、简朴可靠自动上下舟机构，提升装备维护空间与便当。
Simple and reliable automatic boat loading/unloading unit improves themaintenance space and convenience of the equipment.

3、运动部件单面装置维护，镌汰装备背靠背结构占地面积的同时不影响装备维护难度。
Single-sided installation and maintenance of moving parts,reducing the footprint of the back-to-back equipment without affecting the maintenance of the equipment.

4、高速平稳整体模组推舟机构。
High-speed and stable integral module boat pushing mechanism.

5、辅助加热专利手艺。
Auxiliary heating patent technology.

6、快速镀膜工艺手艺。
Rapid coating technology.

7、自主知识产权MES软件、中央盘算机集中控制系统。
MES software & CCC system with independent intellectual property rights.

装备参数  Parameters